The research report on the development of vacuum equipment manufacturing industry elaborates on the development process of the world's vacuum equipment manufacturing industry, analyzes the current situation and gap of China's vacuum equipment manufacturing industry, and innovatively proposes the concept of "new vacuum equipment manufacturing industry" and substitute industry. Based on this, the connotation of "new vacuum equipment manufacturing industry" and substitute products is accurately defined from four dimensions, namely "people-oriented", "technological innovation", "environmentally friendly" and "future oriented". Based on the evaluation system and quantitative indicator system of the "new vacuum equipment manufacturing industry" and its substitutes, a new perspective was used to deduce and accurately predict the development of China's vacuum equipment manufacturing industry. On this basis, a comprehensive study was conducted on the administrative divisions and the development of the vacuum equipment manufacturing industry in the four major metropolitan areas of China.